Title:
Direct Write Nanolithography Using Heated Tip
Direct Write Nanolithography Using Heated Tip
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Abstract
A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.
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10/21/2008
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Patent