Title:
Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
| dc.contributor.author | Gao, Xin | |
| dc.contributor.corporatename | Georgia Institute of Technology. Microelectronics Research Center | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Nanotechnology Research Center | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. School of Electrical and Computer Engineering | en_US |
| dc.date.accessioned | 2013-01-23T20:11:53Z | |
| dc.date.available | 2013-01-23T20:11:53Z | |
| dc.date.issued | 2012-12-11 | |
| dc.description | Xin Gao presented a lecture at the Nano@Tech Meeting on December 11, 2012 at 12 noon in room 1116 of the Marcus Nanotechnology Building. | en_US |
| dc.description | Xin Gao is in his final year of the Ph.D. program in the School of Electrical and Computer Engineering (Research Advisor: Farrokh Ayazi). He received both his B.S. and M.S. in EE from Georgia Tech. | |
| dc.description | Runtime: 20:55 minutes | |
| dc.description.abstract | This presentation will discuss the fabrication, rudimentary testing results, and applications of the polysilicon micro-shell resonator integrated with capacitive transducers. The capacitive electrodes are conveniently formed by doping. The entire device structure is designed with a goal of self-alignment so that it can be used as a high-performance hemispherical resonator gyroscope. | en_US |
| dc.embargo.terms | null | en_US |
| dc.format.extent | 20:55 minutes | |
| dc.identifier.uri | http://hdl.handle.net/1853/45988 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.relation.ispartofseries | Nano@Tech Lecture Series | |
| dc.subject | Integrated | en_US |
| dc.subject | Hemispherical | en_US |
| dc.subject | Nanotechnology | en_US |
| dc.subject | PN junction | en_US |
| dc.title | Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers | en_US |
| dc.type | Moving Image | |
| dc.type.genre | Lecture | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Institute for Electronics and Nanotechnology (IEN) | |
| local.relation.ispartofseries | Nano@Tech Lecture Series | |
| relation.isOrgUnitOfPublication | 5d316582-08fe-42e1-82e3-9f3b79dd6dae | |
| relation.isSeriesOfPublication | accfbba8-246e-4389-8087-f838de8956cf |
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