Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers

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Author(s)
Gao, Xin
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Abstract
This presentation will discuss the fabrication, rudimentary testing results, and applications of the polysilicon micro-shell resonator integrated with capacitive transducers. The capacitive electrodes are conveniently formed by doping. The entire device structure is designed with a goal of self-alignment so that it can be used as a high-performance hemispherical resonator gyroscope.
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Date
2012-12-11
Extent
20:55 minutes
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Moving Image
Resource Subtype
Lecture
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