Title:
Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
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Authors
Gao, Xin
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Abstract
This presentation will discuss the fabrication, rudimentary testing results, and applications of the
polysilicon micro-shell resonator integrated with capacitive transducers. The capacitive electrodes are
conveniently formed by doping. The entire device structure is designed with a goal of self-alignment so that it
can be used as a high-performance hemispherical resonator gyroscope.
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Date Issued
2012-12-11
Extent
20:55 minutes
Resource Type
Moving Image
Resource Subtype
Lecture