Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
No Thumbnail Available
Author(s)
Gao, Xin
Advisor(s)
Editor(s)
Collections
Supplementary to:
Permanent Link
Abstract
This presentation will discuss the fabrication, rudimentary testing results, and applications of the
polysilicon micro-shell resonator integrated with capacitive transducers. The capacitive electrodes are
conveniently formed by doping. The entire device structure is designed with a goal of self-alignment so that it
can be used as a high-performance hemispherical resonator gyroscope.
Sponsor
Date
2012-12-11
Extent
20:55 minutes
Resource Type
Moving Image
Resource Subtype
Lecture