Ayazi, Farrokh
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Item IMU-on-a-Chip: MEMS and CMOS Microsystems(Georgia Institute of Technology, 2015-02-27) Ayazi, FarrokhItem Through-silicon-via process development(Georgia Institute of Technology, 2010-06) Casinovi, Giorgio; Ayazi, FarrokhItem CAREER: advanced temperature compensation techniques for integrated bulk-mode micro and nano mechanical resonators(Georgia Institute of Technology, 2010-04-30) Ayazi, Farrokh