I'm still very fascinated with the technique and I hope I can show you some of the fascination I have for the tools during this talk today. Mentioned I am a chemist so. For me the focused and to manufacture something I want to use in my research. So it's for me it's like helping to. And I will show you some of the results we do in our group but also other research done in the field and as you can see here already. It's a fascinating to not only modifier surface you can image it at the same time and create small movies and I don't know whether you can read it in the back. It tells you. Welcome to the nano tech seminar. Focused and be commercially available. From the eighty's on and it was mainly used in semiconductor industry for circuit repair later on it became very important tool for sample prep and recently if you go to literature you'll see that more and more people use it for now on a fabrication and micro for procreation and prototyping. And I also believe show you some examples for that. As cartridge mention the focus tyrant beam center was opened in August two thousand and five and you see here. Our two assistants you will see the name F.E.I. company a couple of times and most of the slides I show you the results are produced with F.E.I. systems however there are other companies don't want to advertise too strong here. There are other companies like science who has a dual theme or. In this company. She is also. The center of the funding for the focus came from and substantial matching from Georgia Tech and due to good negotiations of Taurus we got to assist in stead of one system so it was a. Buy one get one free deal which we are very happy about. And as you can see here we have two hundred three D. to two hundred and I show you later on. The two systems in a little bit more detail. Mention that I was operating system when I have an operator hired to left after a year to go through industry. So it was like I was not really applying for the position that I inherited. And I had cried for a bit and I wanted to mention already that cars took over the operator position from Turner re on so he is in the building he will be on the truth. Most of the time to help you with your needs. There are no two hundred and the quanta three D. What's the difference between the systems this is the higher resolution and field emission down for the SE and the ion column the Magnum column is the same systems the nominal resolution for the ion you can achieve on the no bar is seven and the meters and on the quanta it's twelve men meters. The difference is the wrecking Pistons in the number is a little bit smaller than the quanta that gives that difference. Another thing to the system will have a micro many Palladius if you want to do T.. That would be the tool to use if you want to do prototyping and fabrication and you have hired topography of yours and I would strongly suggest that you use the quantum system that gives you a little bit more freedom. Another difference is the quantum environmentalists am capabilities so if you want to image some samples if you work a little bit with olive tree. You can do that here under M.B.M. conditions. And if you are interested in a little bit further information we have sent a webpage that stilling to chemistry might change over the next couple of weeks but if you go through the page. We already uploaded the information of the two systems. So how can I AM PM be used to modify or sample interaction is important role for microfiber occasional like I am implantation and also like in space chemistry. So if you have a charged particle and you are celebrated to your surface. You have here listed the main interaction which is used for the operation. So you have that start in the middle. You have either. I am in pain patients. So whenever you do focus. Milling or imaging you will implement calcium irons into your sample surface. You have secondary electron emission you have irons a neutral emission which could be used for like a second. Actor and you have collision. At the surface and if the energy is enough you spatter your surface. If you're willing if you have chemistry in addition in the chamber which is a two year surface you position. It took to commercialize systems the reason for that is you need a liquid metal and source which is stable liquid metal and sources first described nine hundred sixty one. And. In principle what you have you have a rest so far that is heated with metal in there. You form liquid metal there you have a tungsten. You have an extractor Elektra so you apply a potential between your tip and you extract the electrodes you pull the electrode and you can emit and I am speeches which is celebrated to the voltage. So here you have your general scheme. Here you have a list of which have been used for metal iron sources so you see there is quite a bit also allies all commercial sources are at the moment. Basically and sources and the reason for that it has a very low melting point it has a low vapor pressure low volatility excellent mechanical electrical and vacuum properties so what you want to have your own for her first. Source which can operate a significant amount of hours. Since right now a lifetime of about one thousand five hundred hours which is critical and of course you want to have a continuous flow and various the able and the emission characteristic and good ability of the tungsten right here. Here's an image that's one of the liquid metal iron sources. So let's look a little bit more into detail what happens if you heat the reservoir close to the peroration of the cal you look at the Capitol or reflowed to the tungsten tip here. The tungsten of about two to five micron there and you have an extractor. You have electric field in there of ten to the primitive and what you form your form here a tailored. And in principle you have a balance between electrostatic interaction and surface tension and so the field is enough. It's high enough you form a very small tiny pier with a tire five nanometer and then you have a field emission of the ions there and here you see that was published in one thousand nine hundred six. Here you see a tailored for an airlock. The goal and you see nicely tailored here. So then if you apply. You know potential. To the to the source here you can celebrate the eye and be through the column down to your samples. FACE. Of course you need lenses in there and the other like electron column you need the stick mater you have picture and that's a real physical picture stripe because you have high highly mass mass particles. So you don't want. There you know the beam is spreading out and they're meeting. Not at the point where you don't want to have it. And of course you have a plank picture because you have to even the plank if you do. S.C.M. imaging at the same time or if you move from one spot to the next spot in between. You need blanking. OK so the current density you have ten to the eight M. per per square centimeter and the emission current usually is one to three micro amps. The reason is if you have a higher emission current You would form the amorous and try mirth and your quality of your sample spattering wouldn't be as good and you couldn't be as nicely as you can do right now as I mentioned before the nominal been dire meter for the. For the know what we have here is seven nano meter for the next generation so that he will sustain it. Five and a meter and that's a pretty small content spot even if you think the mass. When I started that was a single focused and be an instrument and meanwhile most of the commercially available systems are doing a couple of reasons for that. So you have a combination of color and an eye on call. That allows you on the one hand to emit your sample with him which doesn't do to your sample been able you raster your sample with the ambient Of course you have a little bit of sputtering or you have an implementation which you don't want to have. The other advantage is if you have charging samples charged can be neutralized because you have to carry on the iron with a positive charge and the electron with a negative charge. So for charging samples it's sometimes really good for S.C.M. imaging to expose them. Real quick to the to the I beam and then go back to imaging again. So here's the typical scheme. So you have attacked or for the secondary electrons and injection. So I'll show you later on there are a couple of years into your chamber which helps to deposit material or to improve your process. Vacuum feed our system. I think sixteen. So you can add a lot of being chemistry or chemistry if you have the money to buy them. So right now I am a story and I show you that later. We only have. Over time we might get more mystery. So if you look here. If I have a sample perpendicular to my own column so I can do surface modification and I can simulate ten years. Lee or afterwards do imaging with with. And you have fifty two. Between the two columns. So if you look here that secondary electron image right after the milling here if you were asked the across your sample surface and at the same time your sample is at the fifty two degree. So you can Eisley see the cross-section here modification. Here's just a comparison of the electron ions we're using you'll see the particle size is much much larger of course than an electron it's twenty thousand times. So the resolution of your secondary electron image can not be as good as the electron image with a solution. But you have high mass. So you can spot her and modify your surface which you cannot do with electron beam or not. So the beam sizes in the nanometer range for both the energy is up to thirty K. we beam operation is usually done at thirty K. we also you could choose five but usually modification is thirty K.B. because the lower K.V.'s are not enough to spot and you have lower case of use you have a broader distribution so less resolution. Here that's interesting. You see the penetration you have penetration. There are sixty and then the meter twelve thousand trained and meters for the electrons and I are in here twenty and then a meter so that also gives you the range of. To your sample. We need to focus and be willing and hear the signal per one hundred particles so you create hundred to two hundred secondary electrons per article for hundred particle fifty to seventy two. If you're interested to get more information. There are two good sources there is and you can focused on being technology that just came out two thousand and seven which gives a nice introduce introduction to the technology and the stable is out of there. So what happens if you have your eye on your sample surface there are several processes. You can have either a back scattering of your ion. You can have less and less interaction. So if you have in elastic interaction you emit electrons if you have. If you have less take into action. You have interaction. You see that nicely here. So you dislocate terms in Crystal material you form face changes you have the iron implantation where you have mentioned before. And you have if it's happening at the surface and the energy trends lated energy is higher than the binding energy you have sputtering of your material. So here listed all the effect you can have and the crazy year. Shows you that simulate the interaction the size of the interaction with your eye and beam you see here the penny is a powered you're given with twenty nanometer depending on the energy of your beauty you have two hundred nanometers and the lead is five to fifty nanometer if you expose your beam to your sample surface. If you have a crystal in sample you have non uniform milling so the edges are milling faster and the middle part hopes the middle part of your sample and that's very important. You have dependents of the angle and hitting the surface. So there's a lot of simulation papers which are going into the dependency of the incident angle as well as the energy pm when doing milling. Here you see a simulation of the spotter yield. Versus the incident angle and what you see the highest spot or rate you have for an angle of eighty degree. And the fastest milling sample is sync here and the worst is silicon simulations are done either with molecule molecule or dynamics simulation or with Monte Carlo simulation there are a commercially available for for the kind of simulations and this is the most used the trim or stream code for doing. The simulation is a tropic simulation. So it doesn't account for all the interactions but the model fits pretty good with experimental results. So here is a simulation for twenty five to be hitting copper or silica and you see here that they are meeting cascade is much better for the silicon than for the copper. So here there are more frustration you see for ten and thirty K. we are silicon it takes here twenty eight hours a night for twenty four and so on. So I'm printing all the material you born to mill you have to determine the spot the rate. So usually the commercially instruments provide you with milling files so they determine the milling rate. However if you have a different material and this is getting more complicated if you don't use a crystal in sample if you have like a polymer sample or so then you have to determine your billing rate for your sample. So here a typical milling rate you see aluminum is milling very slow Silica is low and there are already the first limitations you know you get people coming to you and say I want to mill. A fifteen and a trench but it should be Hundred my computer and I can tell you are either way. Doesn't work very well or you want to do a cross-section thing but you have a layer of fifty microns of aluminum oxide on a number in them so that takes forever. And then if you take forever you have tripped you have freed the pursuit. Effect. And so on. So you know there is no take me. We can do everything you want to do so you have to think about your sample and your application. So here are the basic operations. You can do imaging the secondary electronics for imaging and this is sometimes quite help because it gives you a better contrast electron imaging and it's called challenge tunneling so sometimes and this is dependent on the angle and. So sometimes if you change the angle you can really nicely resolve grain boundaries and lead in an area of twenty meters so you get a much higher contrast compared to imaging. And we're of course you can spot the smiley but it looks more like a middle ghost there than a smiley and then you can do chemical action if you haven't interaction and here we just deposited M R R C on the silicon. Substrate. So about half in the literature. Here is just a list you can do devise modification mask repair that was one of the initials motivations for focus. And you can do basic imaging grain and. There is software out for three D. recon corruption so if you slice through the material then you can really construct it later on. You can do micro and then that's the part we're interested or our main focus with. You can do with their position. A lot of people use our systems for their. They make contact. If you have a single belt or if you have a carbon and you want to have a sensor. It's pretty hard you know usually to make the contractor electrodes. So here it's very easy you can contract with the position I show you that later on and then of course very important part of this sample preparation. If you do usually polishing sometimes it's hard to get the point of your sample you're interested in polished to less. So this is very very nice and I show you examples for that and then types of samples in principle there is not real limitations of course if you samples. You have to take some measures to get good results and then you have to think about what happening before on the list the heating of the sample due to the iron solid interaction is a problem and I show later on an example where you see the effect of heating and if you polymers you know the energy my trust be enough to form other reactions in there and you get a false result of your cross-section. So nice thing is you can upload files and this is not scientific. What I show you here but I think it was nice of first this hour so you can upload any from a web page. I did the day before Christmas in the afternoon I create my own Christmas card and I shouldn't do that on a scientific instrument but I just uploaded the file and do the milling and you see here it just added Merry Christmas and you have a nice Christmas. Card a micro Christmas card with very high resolution you see here the bar's five microns so you can get features resolve down to fifty nanometers and here you see if you have for grayscale image the rate of milling is different so you can do three dimensional structuring with one map and there is like in the recommended before the toilet and I thought I'd put it on the paper on the slide but then I thought I already have something on scientific symbol. I didn't want to add something more so than a little toy. But they're also made for micro Motors. With with Matt Miller. This is an example published by a serial long screw up to have here. You know this nano helix milling using I guess the Noble. And with the fish they could determine that the preservation of the shape after birth. So there is no relaxation of the Nano helix with the focus there and here. So you can do a lot of surface modification. Another example I looked at and you see here this is a nano particle with the diameter of sixteen nanometer and that's covered with a layer we had a collaboration with also in chemistry layers. Sensitive and heat and fatigue so if you change the temperature they swell. And they can collapse again and we did some studies on that and this particle without any contact with coating. So with a sixty nanometer. You see it completely. But it's pretty hard to do the milling because it's a non-contact of samples so you have tripped involved but you see here nicely the hydrogen covering the particle and of course that would be a nice example if you could combine that. With an Because then you could do afterwards and measure during swelling of your particle. Another particles or we are working on molecules printed polymers and it would be really nice you know there is the chemical or the chemistry society is drawn into two sides imprinting is nonsense and the other believe or think they have scientific. It's working. So it would be nice if you could make a particle and see whether you can see the micro channels of course again this is conductive sample it's pretty hard to mill. So what I tried and that was a shot. I thought if I soak it in I only can liquid and might get a better contrast than if they ionic liquid would penetrate into any porous there. I might have enough contrast to see. The cross-section. Particles So this is one sphere and it's covered here with ironic liquid and cross-section ink. However I don't feel any channel so either you know my own intellect or it was not the right choice or again due to the interaction with a higher energetic beam I might modify the surface or the interface don't see the channels but I think it's a nice demonstration what you can do in single particles with. Another nice capability. You can do out to slice and so there is automatic software you can set up. You see you can define slices and then you know it's creating a reconstruction of that and again this was part of a micro part already had in there and you don't see a good contrast if you have inclusions in your material then you could slice through and you get the construction of your inclusion of particle in there. Prototyping I mentioned before the community is growing more and more to prototyping Here are some examples provided at F.E.I. you see here nano print so you have thirty nanometer now on approach to positive with even chemistry there you have a full Tanika Ray so you can create very nice regular patterns. However. A lot of users come and say I want a one centimeter by one centimeter of fifty millimeter pillars. So the field of view for that is four hundred micrometers so you're limited in what you can do you could do feel stitching so you move your sample on however you introduce about twenty percent. And again depending on your sample and it's kind of tricky. That's our only research what we do we modify cantilever in a way the contacting layer and then to lever and then to flip milling to expose the electrodes in principle what we want to do with scanning electro chemical microscopy So you use here to probe any micro like for chemistry or activity going on on your surface and that's very interesting for biological samples there are a lot of bio active and allied for example on the cell surface. You can measure glucose A.T.P. hydrogen peroxide and so and so on. By having a little electro tiny electrode integrated into this and you get the topography at the same time so you add to scanning pro pier and then another pro is working as opposed to going. He created the terror probe and you see here the resonate with your the aperture radiation. So you see you can do a lot of prototyping fabrication. It's a serial pro se. So it takes time and of course therefore just again how you can use for milling so you can opt depending what sample holder you have you can upload quite a bit of cantilever to hear the modified and then. And you can record. And you end up in a nice example. And I and how are you here. He was working with six in the cantilever. With. The beauty by electrochemical the position or. Sputtering different electrode material you can modify each individual and then you have the whole sensor. And again in the last step. This was micro fabricated from scratch and the last that the opening was done I focused on and there is not a lot where you can do a three dimensional structure at that scale because if you do regularly talk or a few larger electrodes for for resolution you are interested to have a very small electric. So. I mentioned before that you can guess chemistry or chemical reactions involved and here is a list right now. And that's mainly for circuit repair or protect or contact your sensors and here is the chemistry imprints of the organic precursor going very close to your sample surface you introduce us to your sample surface there. And then interaction with the carrier and use the precursor material on your sample surface size of mosque you used. Also you have gas assisted very important. I mentioned before a problem is read their position so whatever you may weigh that space somewhere. So usually if you take a trench you see you get a cold because you have position of the material you can improve significantly by having chemistry and you can have selective carbon mail in principle that both the polymer samples and then you have an insulator and that's fluoride or metal and Hans you have guests here. And you see here are the parts so you can add a couple of them to your system. If you are rich enough to do so. Here is an example that was recently in the Netherlands and here is a ring resonator that was arsenide and you see here. On fluoride very nice clear features very steep. If you do the same milling without any beam chemistry you see you have a lot of the position you have you have like droplets formation all over the which is not what you would like to have if you want to do your micro nana for brick. And here you have and Huntsman's for the different chemistry. And also some of the chemistry are slowing it down. So if you want to mill polymer on a silicon You know it's good to have selective carbon because. If you only want to milk the polymer you know your silicon winning rate is reduced significantly and your polymer is enhanced so nice to have all of them but. The money was only there for one with the president's position. Example for the selective carbon mill. Again and here you have an example for milling polymer without. And with significantly difference between between the two and of course I mentioned before you have your sample perpendicular So if you feel it's going onto your sample surface it's very much dependent on the structure of your sample. So you. You have different milling rates on your sample and if you have an alloy or different material then you have very different material rate which is sometimes frustrating if you want to have a clean trench in your sample. And again here you see the rates for the polymer. I go a little bit more into depth for the Platinum the position because we are interested in we want to use the deposited platinum as an electrode. And because we have the system here. So you have the organic precursor you heated you bring the needle very close to your sample surface we're talking about one hundred fifty to three hundred micron. And then you have your precursor onto the sample surface and then you hit it with the galley or you split the precursor and you have your position here. And as you can see already here. So you have the ratio between carbon. Platinum is unfavorable So you you compensate you don't deposit platinum competent materials or principle you have proven implantation you have carbon and you have to know. So here are some examples a line that was deposited with a beam current of one hundred nine a meter looks pretty nice and this is what we are working currently on are you still working currently on we implement biosensors into this air. However if you have such a small Elektra mound of biomolecules there is pretty low and there for the current yield is very low and noise is a big problem if you're scared you have the to attach to the scanner if you scan across the surface. So we thought we can keep the lateral mansions pretty pretty much the same but we can increase the electric active area during the deposition and have a good Elektra. However this composite material is not very favorable for electro chemistry and we can tell you they have. Here we made a nozzles we feel the backside of the string with platinum and then drill a hole through so you could use to you know if you bring it close to your sample surface to suck anything that's released there so that's not very far but that's an idea here we have to do that. So here again small alliance twenty five nanometer lines and you can get about lines about twelve thirteen nanometers but you cannot create a paper. One millimeter with an enemy lines. You can also use platinum their position however you have even a higher and lower contact because you don't implant with the contact. So if you're only interested to use platinum contact. It's fine if you want to do a little bit further investigation like power. So here is a scheme for the trade. If you think about her and if you're too high the sample faster than you can deposit the material. If it's too low the pro's extremely slow to a point where you just precursor and you don't get any position. So you but you want to have a medium range rule of per square my commuter However if you change the middle position and your position are changing dramatically. Maybe the composition is changing so there is a lot of effect influencing your position there. And that I mentioned some studies on the very current and you see on our system even for five hundred were not mailing the samples we are still paying and you see the growth rate. Also we are interested in the platinum content so if you go to literature you'll see that the bear. Quite a bit so you have reports from fifteen to twenty up to fifty percent and platinum since we are very interested in the high platinum content we try to reproduce value and Justina collaboration with. Years on I think of one my computer patch you laid out our platinum content on our systems and she tried post pled Quantrill and is about twenty percent. So she contacted her and all is quick on track to the F.B.I. and we're still not sure because you know there are a lot of in certainly how they use selective carbon will claim that they got up to eighty percent. However it was not reproducible but if you do electrochemistry you want to have the same composition every time. So you're still doing a little bit more further investigation on that and of course we're more than happy to share that data with anybody of you who is interested using the positional number system. Another example because I talked about the can send each group made a sensor of a single diatom and they use that and the platinum for contacting so they have here and that was published in Nature. It's already out there didn't update that they happen and guess answer with the single and the focus that may be possible. But that's a very nice application for that. Now the last time I would like to spend on in order to prep you need a micro many to you or your you know your little sample out and our system has the client Eric. Not as convenient as the only prob in the US usually the systems are equipped with only protocols are software controlled. For the client you have an extra so you have to be very careful when you're micromanaged don't pump into your. Color choir bit of experience before you are allowed to use but here you see this fine needle you can manage. With your sample you can use the platinum position to Psalter a part to the needle and lift it out and move it to just stupid movie sample but it's nice you can make a snowman. So you attach it with the platinum you put it where you can attach it and then cut it here with focused and in and since it's a nice compact example you can create a movie at the same time when you do it with the platinum growing and. A nice example if you go to prep hours it's a little bit more tricky because you want to have a very very thin layer Mellor and then you have to take it out. So here are common techniques. So the part that's called because it looks like and if you do that. So you do a mechanical pretty thing off your sample then you mounted to a copper crate and then you do find anything for you for your sample and to lift out. You then you put. You put your sample out and you already cut it out but only a little piece is holding you a teeny tiny sample and then you'll need an extra micro-mini plate and an optical microscope microscope and you. Capillary forces or electrostatic interaction with a fine class could pillory you to pull yourself out. I think it sounds already that you need a lot of experience to have this very like fifty two hundred never meet the nicely prepared or very nice out. So you do everything in the chamber you have to come in there in your sample you pull it out. You put it on a career and you're done. And you know as an experience I think you're more in the experience and you show you later on. You can come down to a very different time and that was an application engineer in twenty six minutes but he didn't answer any questions. He was like you have to be quiet now and then he was like working on a very impressive twenty six minute I would like that. So here's this you have here to put your pretty clean sample on there because you don't want to have the implantation into your sample that's pretty tricky thing in it and then you. You know you from top and you view it from the side. And. Here you see here. Nice contrast in there sample. So the first thing you cut from for on from the middle and cut it out here. So you use a focused and beam again and then you mounted and then you can lift it out. So here is the whole regime. So here you have the cross the road. Cutting and then you either you when it's still in or you mounted to the grid the grid and then and then already on the grid and here you see this you share it on a cart you have to tilt the sample stage here you see the needle coming in you attach your leg to the needle using the platinum then you can lift it out and mounted on the cord. And I mention automated software. So you can mark the spot of your sample you lay out the Platinum. Paired here. So this is the recognition mark for you or for you. Automated software. It can correct for shifts and then you do the milling so you can start bed at night and come back the other day and you're at this position where you only have to take it out. I have to admit I don't have a lot of experience with that we are no fair. People should get up to speed and I hope you will be able. If you. You know if you don't use it all the time that he is preparing himself for you. So here just a list of what you can do and don't think due to the time I read that right now I want to show you another where also listed the disadvantages. So you can do math class patterning nanoscience mailing difficult materials can be processed and so on and so on. However it's cost intensive. So the hour the charge here is forty five dollars per hour economic rate if you need an operator eight hundred nine dollars. You cannot do so it's a serial process things you know if you want. To process away for takes time. And then you have sample damage due to the imaging and implantation or heating and sometimes it's tedious to find the right. Milling rate for your materials or if a new material you have to start all over because you want to have nice wheels and with different grain orientation and different materials in there might take quite a time. So to show you an example and the person in collaboration with Dr has interest code. Paper samples with the polymer we had another collaboration and I talked to the still working with the that's interesting because what they would like to know is how is the polymer penetrating into the paper and. I didn't want to spend many many many many hours on that because it didn't give reproducible results. Here's just a single fiber you see here nicely the fiber. And this is moving into the fire you see here again the structure here this is a polymer coated you see here nicely the polymer layer and then the fiber structure of the paper. However the paper is Hundred my commuter think here quite a time you see here it's mounted to the carbon. Here you see the polymer of the paper fibers and the polymer but it's really hard to tell sometimes I have a contrast see how it's penetrating than a middle position. And I didn't feel and then if you look at your sample afterwards with the optical microscope. You see that you do quite a bit of damage on yourself about ever you see here might be just an artifact and has nothing to do with how do you. The Palmers really had it right there. So in order to avoid that it would be nice to have a cryo stage. You could freeze your sample and do the full milling on the frozen samples so you would reduce the damage done by keeping quiet. And this is very interesting in that star starting right now. Penn State has a system with a cry was stage. So this is very interesting for biological polymer research to have this tool and in principle. It's just so you have a transfer tambour and then the cool state. Another possibility for Polymer samples is using the environmental S.M. However you cannot mill high vacuum for doing any by milling. Examples we started we looked a little bit silly but I think you know you have to it's in principle we have a water atmosphere in there and you cycle that and I think when we did the cycling we didn't we were not careful enough so we tried to sample out before we really did imaging there is now available and I think Shell already bought it for the SE. There are caps where you can keep your sample in a liquid. It's like with a member and the electrons can penetrate your sample real wet in there and here are some literature examples of a unified South and I think you get pretty nice imaging and then also you know the environmental S.C.M. is here. I think it's just somebody playing around with using. Sample. Here's the crowd I mentioned before. Again you can freeze your hydrated and you read quite a bit so couple of papers out is an application you see here that was a polymer with ceramic particles and you know it's smeared out but you see nicely the contrast here. Here is example of an outer membrane two hundred men a metre you. And that was also cryo So if Marcy is very rich and needs to spend some money something interesting. Again limitations are you talked about here's an example for the wanted to have a five hundred nanometer whole thing twenty micron in and what do you see here now is this really filling. So this would be an application where the chemistry would be very helpful and chemistry. What you have to do if you have to move the cones or if you're only interested in one side you have the small you can mill from the other side and try to bear. And then here. I mentioned before that the trench. If you just apply a line in the pedaling that's durable but if you want to have that on a large scale. I I don't. So the repros produce ability wouldn't be good and then another limitation of. If you do really like sometimes you know somebody comes and say I have a flaw. And I want to make a crating in the slides so you have to otherwise it's really the truth. You never get a good resolution of that. Something else if you have money you can buy a flip in the chamber. So you can do the processing and imaging at the same time which would be also nice to have got of course very very expensive again. And with that I would like to thank. Post. Now the center and one of the major reasons we turn to the characterization center the I.P.S.. Has really building problems so we had in summer we had temperatures over one hundred in there so the electronic was failing because one of the Tiller was not working and you know we were really scared that we're not covered under the service contract anymore you couldn't use the system we had a couple of power outages for a long time with water in there. You know and that's just not the right thing. We had the power room across the hallway we had huge bill cancellation systems and as I can see here the room is really good so far so I think it was a good move to do that I would like to thank all the people because he is now in charge of the system so I would like to thank our service engineer who lives in the area. So if there's a problem. He comes in. Research questions and then people involved in our. And Brian what are you. And Dr has for the paper collaboration and of course and for the funding in your for your attention and the hope for too long.