So.

My name is Greg book.

The laser just up working OK.

I work here at the nanotechnology research
center under Professor Jim mind And I'm.

The principal research engineer and
the assistant director for research here.

And the reason why I
wanted to give this talk.

Well let me give you a little
of my background first.

I've been here at Tech for
about seven years now.

I graduated with my Ph D. from tech in
one thousand nine hundred sixty material

science and then I worked out in
industry for about seven years

at Intel Corporation and
I came back here to work under Dr MEINDL.

To be part of the expansion of the.

Georgia Tech clean room to serve
users outside of Georgia Tech.

We have a large grant from the N.S.F.

called the national nanotechnology
infrastructure network Grant and.

Our job is pretty much to make these
same resources that are available here

in our clean rooms available to
researchers outside of Georgia Tech.

And the reason behind that is that
it's very expensive to operate

a cleaner like you guys have access to and
not every school can do that.

So we make those resources
available to other schools and

other small companies and
even large companies who don't quite have

access to all of the infrastructure
that we have so the reason why I

want to talk today is
that during my time here.

I have quite a number of users who ask
me How do I use the E X on the S E N.

OK And
then as we get into to discussing it.

I may find out that they don't need to use
the E X they need to use the X P S where

they need to use X. ray diffraction
they need they need to carry.

Riser material in some other way
than what they think they need

to characterize that material.

So I think it's worth it to
take this time and begin and

this is I hope what is
the beginning of a series of.

Technical scimitars for our users.

You know which most of you are.

To discuss not only
characterization techniques but

also best practices in maybe
plasma etching or C.V.

D. or or or something that have to do
with your processing in the cleaner.

So today however I do want to discuss
characterization techniques at the N.R.C..

And what they're used for what they're.

What type of materials can be used.

What kind of information you
get from these techniques.

And I was hoping I would
I was waiting for.

Brant Carter to show up.

I thought was going to be here.

He's really the.

The Georgia Tech resident expert in.

Characterization materials
characterization he knows everything there

is a know about surface science and
he's always been my resource.

When I need information about what
technique is best and also how

to interpret the data that I get off of
some of the some of these tools we have.

Hopefully he'll show up because I was
going to for any questions to him but

since you don't.

Here I'll see what I can do.

All right so.

Today.

Like I said this is not your normal
nanotech seminar I'm not going

to talk about my research because
I don't have any research.

I'm going to talk about our
capabilities and hopefully.

You guys will learn something about what
you need to use to do your research.

Where to spend most of the time on.

Can anybody see that dot.

OK We're going to spend most of the time.

Getting to know S.C.M. an E.T.S..

How many people use the sci.

Right.
This is probably the most used

this is a what I call a workhorse tool.

This is the most used tool on campus.

It's got to be because everyone
needs to look at their samples and

sometimes they look at huge samples
sometimes a look at tiny samples.

So understanding.

How many people take an S.C.M. class.

Right.

So like three people out of all you so
there's a lot of theory in and

complicated electronics behind S.C.M.
an E.T.S.

that if you understand it makes
using the tool out easier especially

when you need to do chemical
characterization of your samples.

So we spend some time talking about that.

X. ray photo electron spectroscopy
this is also very powerful tool for

surface characterization.

And now we have some much

more capable equipment within the N.R.C.
than we used to have.

Violent photo electron spectroscopy X.
ray diffraction time of flight sims.

X. ray florescence and
Raman spectroscopy So these are.

There's a lot more out there to do
characterization of your equipment but

this is what we have here so
this want to talk about and

I only have an hour and
I'm hoping no one takes thirty minutes.

OK So let's start by understanding
a little bit about electron and

specimen interactions.

So there's basically two types of
two main types of scattering when

you bombard a surface
with an electron beam.

You've got elastic scattering and
you've got inelastic scattering.

Elastic scattering are events that effect
the trajectories of the beam electrons

inside the specimen without altering
the kinetic energy of the electrons So

basically what's wrong goes in and
it moves and still has all of its energy.

Inelastic scattering.

Are the events there is old in
the transfer of some of the.

Energy from the electron beam or

beam electrons to the specs to
the atoms inside the specimen.

So inelastic means they're losing their
energy right here's an example of

elastic scattering right your billiard
balls nice nice classical example

not quite purely elastic but pretty close.

You know billiard balls and ice and
hard to hit on the bounce off each other.

It's kind of elastic scattering.

So inelastic scattering in elastic
scattering the beam electron hoops vaca.

It interacts with the atom
in the sample and

scatters resulting a change in
the velocity vector of the electron.

But very little change in energy or
no change in energy.

So he won this illegal the easier But
it changes direction.

Now elastic scattering are the ones
that we're interested in doing

chemical characterization because whenever
you have any last elastic scattering.

There is a transfer of energy.

Whenever there's a transfer of energy.

There's something going on within
your atom that creates these.

These transitions
electronic transitions and

whenever that happens there's all kinds
of characteristic transitions that

occur that you can use to
identify what that element is.

So elastic scattering or
Rutherford scattering.

Is when it is the electron is scattered
by cool interactions with the charge

of the atomic nucleus.

OK there is some energy loss.

I'm sorry this is a lasting scattering and
we get to.

Inelastic scattering next.

So the energy loss is negligible.

The scattering angle can be
anywhere from zero to two pi.

And then back scatter electrons are the
ones that come back out of the surface.

OK Now inelastic scattering this
is the one that's interesting.

I apologize for that.

This is when the beam a lecture.

John.

Interacts with the atom and

it transfers energy OK I like to use this
illustration here because it's just cute.

Clearly this automobile underwent
inelastic scattering with his boat right.

Deformed bumper deformed you
know wheels the boats torn up so

it transferred its energy
to this boat right.

So inelastic scattering.

The energy.

Transferred can range from
a fraction of an electron volt

up to the instant electron volt in its
I mean meaning it can use a little bit

lose a little bit of its energy or
can lose all of his energy.

And so
it can do that through a number of ways.

There's all these different types of
interactions you've got your phone on

excitement.

You've got plasma excitement secondary
electronics Siteman brim strong X.

ray generation and of course iron is ation
of your electrons in your inner cells.

So.

When using S.C.M..

You've got your primary beam electron beam
coming down and hitting your surface.

And once it hits your surface it now
starts interacting with the surface.

The amount of interaction is greatly
dependent on the initial beam intervene.

OK.

If you have a very high.

Initial energy you get
lots of interaction.

If you have low energy.

You don't get so much interaction.

Into the surface.

OK So the types of interactions that
are occurring within this interaction

volume what we call it or the volume of
primary excitation or interaction volume.

You get X. rays generated characteristic
X. rays from inside this area.

Also from outside of this area
some Sometimes if you get X.

rays interacting with X. rays.

You can get O.J.
electrons escaping from the surface.

Yes secondary electrons and
I'm a define these later.

Coming from also near the surface

back scattered electrons coming from
inside of your interaction volume.

So experimentally.

This is what it looks like if so this
researcher here is that of a textbook by

the way it visually shows the interaction
volume of the electron beam

what was done here is basically
if you if you expose P.M.A..

The X. rays of the P.M.A.

is dependent on how long it was exposed or
the dosage it got from the electron beam.

If you guys do and
then of the few who does the E.B.M.

then of the target the you guys kind
of know that the dosage affects

your development time
of your resists right.

Now I'm not making that up right.

OK So this is kind of visually what what
what happens when your electron beam

interacts with.

The surface.

OK.
And

another type of thing you need to
think about when using I.C.M. is.

Topography.

So when imaging with the S.T.M..

If you look at a sample that
has a lot to park on it.

Some areas look brighter than other areas.

The tilted areas appear
brighter than the flat areas.

The reason for that is this is because
if this is your sample surface or

or your sample orientation.

OK if you tilt your sample the electron
beam is always coming straight down.

OK the electron beam come straight down.

And as you tilt your
sample you actually start

getting into that interaction volume.

Well this right here this layer.

About of about fifty
nanometers of your surface.

That's the depth from which secondary
electrons can escape deeper.

In that the secondary
electrons can't really escape.

And you're using that as the in your book
mostly looking at secondary electrons.

So if they can escape from in here you're
still only getting kind of imaging from.

This area mostly and
then some of this area.

And as you tilt it.

You're starting to get a lot of secondary
electrons coming out of this escape depth.

So it'll appear a lot brighter until
the sample peers a lot brighter and

the S.C.M. So
that's why they are so let's look

at some of the interactions that
the atoms have with the electron beam.

And this is where we get to now
our characterization our chemical

characterization of your samples.

So in the second there electron
beam comes in and interacts

it can knock out the say this is our
instant electron beam coming from here.

It hits an inner shell electron
it scatters and it can also E.

ject that electron if it effects
that electron it leaves a vacancy.

OK when this electron in the outer
shell relaxes into that vacancy.

It can release.

Of a photon of energy.

OK that photon of energy
is what we call our X.

It's an X. ray photon it's
characteristic of this transition.

Of only this atom this transition
has a characteristic energy.

Now it could also instead of
emit a Instead of emitting an X.

ray photon it could emit and
oj electron and

electron is basically an internal
conversion of the energy

from the relaxation of this electron
over to another electron that pops out.

So it has also characteristic
energy that's related to this.

Transition.

So in S.C.M. speak.

This is the type of notation that
is used to identify that radiation.

So if you if you're if you're relaxing or
you're exciting from say.

Your ground state all the way up to your
outer electron and then you relax or

your outer shell.

Let's say you relax from this
outer shell down to your L.

shell then that's called
decay alpha radiation.

OK.

And whenever you go from you know so.

So the physicists like to use this K. L.
M. in notation for their electron shells.

So if you want to call you know.

So each material has its
own number of orbitals and

it's got its own characteristic.

Emission depending on how many electrons
are can't can transition within that

that atom and so

this is just how they this is how they
notated notate that that transition.

All right so let's talk about E.T.S..

Here at the N.R.C..

So like I mentioned the type of
signal that we're detecting India X.

using the S.C.M.
and it can you can also use T.E.M.A.

as well but we don't have any T.M.C. here.

So if you're using S.C.M..

One of the you know the signal that
you're detecting a characteristic X.

rays emitted from that first
few microns of the surface.

And the uses Well elemental
composition with imaging.

So the cool thing about S.C.M.
is that you can take your image.

And you get all know how
as the images are very

detailed very powerful
to determine structure.

You can do an X.
ray map and you can overlay

the compositional information with
your topographical information.

And so it gives you a lousy
you to visually see that.

This area is rich in Copper this
area is rich in nickel etc.

It's quite quantitative.

It's easy to use and
it's ubiquitous S.T.M. is everywhere.

I mean ary.

Every college ever been to has some sort
of an SE in there somewhere on campus.

And companies all companies have S E M's.

I mean the bigger companies

have their S.E.'s because it's
just such a powerful tool.

So one of the limitations Well the Tomic
number needs to be greater than

Boron it really has a hard time
detecting elements lighter than Boron.

You need vacuum compatible
materials because in and

electron microscope you
have to be under vacuum.

The sample size is pretty
much chamber dependent.

So like in our Zeiss we can load.

A eight inch wafers.

I think.

Yeah we can load eight inch wafers
through that sample chamber.

The resolution is point one
to want to Tomic percent.

Under best conditions.

The depth resolution as I mentioned is
about a half to three microns depending on

your material of course lateral
resolutions about point three micro So

the lateral resolution is not as good
as your S.C.M. imaging resolution.

Right because as I've shown the X.
rays are getting emitted from

a wider lateral area than your secondary
electron in the images are coming from.

And the samples need to be conductive.

But it's OK to have to gold coat
your insulating samples and

you can still get information from that
but the gold coating needs to be thin.

So what do we have at the N.R.C. we've got
the Zeiss which is a very good microscope.

We've got the touchy thirty seven hundred.

In the organic.

They in the Marcus building here.

We have the thirty five hundred
in the pet a clean room so

we have an electron
microscope capable of X. in.

Both clean rooms and
one outside the cleaner.

And this is what the E X spectra looks
like it after you after you take it so

here we had a sit we have some lines.

OK some gold lines.

And.

If we take a spectra of this area right
here we get silicon oxygen and some gold.

We take a spectrum here we get
silicon oxygen and some gold.

Well you'll notice that even though
we're not scanning the go there.

We're getting some gold signal and
that's because of the spread of the X.

rays coming the the generation of a you
know the interaction of the electron beam

with the whole surface so we're getting
signals from a much wider area than just

where the electron beam is because of
the back scatter electrons because of

the secondary electron interaction
with itself as I showed you earlier.

So this is kind of an example of that.

So even though it says we're getting gold
right here this is one thing you gotta

be careful about with the dx
is you got to understand it.

Well you know there's probably
really no gold right there but

it's telling us we have gold.

So what I want to take away from
this is if you're doing media X.

Don't don't don't just take the data
that it gives you and tell you

that and assume that it's giving the exact
information because it's saying there's

a woods of ten percent of gold right
here and that's clearly not the case.

OK.

The other types of interaction
that because of that so

all of our characterization techniques
pretty much involve either electron

interaction with Adams to generate X.
rays.

X. ray interaction with the atom.

To generate electrons or

extra interaction with the atoms
to consume to generate X. rays.

And limit let me take a backless it's
not just X. ray interaction but but.

Electromagnetic Radiation interaction so
it could be ultraviolet light as well.

So the photoelectric effect is
talk about what happens when

atoms interact with radiation.

So when the service is irradiated with
say X. rays or ultraviolet light.

The electric electrons get excited and
they relax and

they emit just like they did
in the previous example.

So photo electrons escape
when the instant energy is

exactly that of its binding energy and
they're measured when the kinetic energy

exceeds a Fermi level that of the detector
so this is specific to an X. P.S. system.

So let's say you've got a detector.

You're reading a sample with X. rays.

And you're going to measure
the photo electrons are coming off.

So the way the X. the experience works
is we give it a monochrome aided

energy beam of X. rays.

And as we radiate the samples
that's going to be.

That's going to be this right here.

OK.

As we irradiate the sample
photo electrons pop out.

We're going to measure the energy
of those electrons Osisko right

here in order to measure those electrons
they've got to get to a detector.

So in order to detect them they've
got to overcome the Fermi and

level of the detector itself so
that's discovered right right here.

What's left is the binding
energy to generate that extra or

that photo electron.

So that's the way X. B.S. measures.

The characteristic
energy of that material.

So the way it works is you've got this
instant photon coming in the Jets.

A photo electron.

Straight out of
the straight out of one of.

One of the inner shells other things
that could happen is that as it

as these electrons relax in these
other shells these inner shells

were generating the same characteristic X.
rays that we were.

In the previous example.

But what we're going to be detecting are
these photo electrons instead the notation

that is used for
X P S is something that is titanium one S.

So this electron coming out is going
to be a titanium one as electron.

OK Just in addition to generating.

Photoelectric ons we could
generate oj electrons.

OK suppose a electrons are emitted
when the energy released and

forgive me for
reading this but I'm going to.

From relaxation of an outer shell
electron to a vacant inner shell and

the energy is transferred directly
to another outer shell electron.

So in this example here.

I want to as level electron is
excited by the irradiating energy.

An electron from the two S.
level relaxes filling the want us whole.

The transition energy is transferred
to a two P. a lecture on.

Which is emitted.

So the spectroscopic notation for
that transition is it for

this particular atom oxygen K.
L. one L. and you put two

three because you can't tell if it's
two or three they have the same energy.

Sometimes of the sail too and

this is the way that looks
from an energy band diagram.

You've got.

Emission of this electron relaxation
of this electron emission of that all

of that electron that was a electron.

OK So
let's talk now about the strengths and

weaknesses of these of these techniques so
for.

So the radiation source in both
I put both X P S and U.P.S.

on the same slide here but
for X. P.S. the uses.

I mean what we use is the aluminum K.
off a peak of one point five six.

Havey that means we're radiating
the entire sample with one point five six.

K.V. and all the radiation coming off.

Can go from zero to one point five six
K.V. and the way that we detect it

is you're basically scanning your your
detector has a certain pass in or G.

and it detects certain
energies as it as it ramps.

So this is just collecting the photo
electrons that come off the surface.

And U.P.S. we use a U.V. lamp and we're
using twenty one point two electron volts.

OK so that's a big difference
right one point five six that.

Fifteen hundred versus twenty one right.

So the benefit of using your P.S.
is that you basically and I'll

go down here to skip down here for a sec
is you're getting valence band structure.

Is that U.P.S. really can't eat ject
those inner shell electrons are just and

doesn't have enough energy.

But it's very good at looking at the
valence electrons in heavier metals and

also in.

Some other organic type of materials.

So any way the signal detected
we have further electrons and

electrons are emitted that are near
the surface one to ten animators

this is the strength of X. P.S. and U.P.S.

it's very surface sensitive
because the photo electrons have.

They don't that they can escape from
a very very deep in the in the sample

they can only come from the first one
to ten nanometers of your sample.

So these are very powerful
surface science tools.

So the use of course surface analysis
of inorganic materials stains or

residues ability to determine
chemical states and

you can do depth profiling in both tools
you have you can sputter away the surface.

Do your X. P.S.
better way the surface to your X.

P.S. so
you can you can profile your sample.

You profile the chemical composition
of your of your sample into the sample.

The strings is quite quantitative and you
get elemental and chemical state analysis.

So some of the limitations.

Well I mean these
are really limitations but.

I say it because these
are there are there limits.

Point zero one to one atomic percent
depending on what you're looking at.

You have to have you H.V.

compatible materials because photo
electrons are such low energy.

Coming out in order to
detect them you need to

prevent them from undergoing any
other collisions in the gas.

So you need you.

H.V. conditions.

Of course sample size but as such.

Back in chamber dependent in the in
the thermo tool that we have here

you can take about a.

I say it two and
a half inch square sample.

The smallest area is.

Ten microns in R K off
a tool the smallest there

is thirty microns because it's you know
it's kind of hard to collimate X. rays.

So you have to do it using apertures and
so

the smallest aperture we
have is thirty microns.

But it can detect atomic
numbers greater than helium.

So you really it's pretty
much most everything right.

This is what the spectra look
like you know the X P S spectra.

You start scanning this way and
you're measuring the binding energy and

you see you get nice clear peaks when
you have a copper carbon want to oxygen

one has these are Oshea peaks
remember the notation is different.

So these are O'Shea peaks.

In the U.P.S. spectrum.

You notice the energy only goes
from zero up to about twenty.

But the difference is you can
get these chemical state.

You get your resolution is much finer So
for the valence band.

You can you can differentiate
between the chemical states.

Much more easily than you can with X.P.
Yes.

Now another technique.

Is that we have here is called X.
ray diffraction.

X. ray diffraction is very good for
identifying phases of your material.

It can identify just about any material
that's in a solid crystal in form and

for which there is a library of known.

Lattice spacing.

The way it works is off Bragg's law.

I am greatly over simplifying for
this presentation because X.

ray diffraction is one of the toughest
courses I've ever took ever taken.

But it up rates off of this in
lambda equals to the scientists

that are you've got your your
wavelength of your X. ray.

You've got the lattice spacing and

you've got this angle coming
off the only time you will get.

This brag diffraction is when you have

planes that are parallel to the surface
and you can get this construct of.

What you have to have constructive
interference in your waves

as they come off of your different light.

I lettuces.

And that's how you you do your detection.

So it requires that the planes be pair.

Well flat I guess normal.

Parallel whatever you
know eat the idea right.

Is that only only only different
diffraction only occur from

these floodplains.

All right.

And so.

You can use different types
of radiation sources but

it has to be monochromatic and
has to be known.

And that way you.

You know your lambda from there
you can you can calculate

your your DE because you.

Usually people use a theta to theta
system where both the detector and

the source do this.

So you're constantly keeping.

That angle.

Equal to each other.

All right so.

In most sources that I've ever used we
have the copper K. off a source and

that's what we have in our Philips
expert system and the two forty eight.

And the signal are based that
we are detecting are X. rays.

So you send X. rays in get X. rays out.

This is a nondestructive technique for
characterizing crystal in the materials it

provides information on structures phases
preferred Crystal orientations I.E.

texture and other structural parameters
such as average grain size Crystal and

straining Crystal teeth.

So the very powerful tool for
understanding.

Christopher doing crystallography.

It is nondestructive.

Quantitative it can be done.

You don't need vacuum conditions you just
put it in it's under it's under under

ambient conditions easy sample prep
mostly people do powder diffraction but

you CAN I did when I was
here a lot of thin film.

Diffraction.

But you have to make sure it's flat.

It's got to be very flat.

Some of the limitations where
the material has to be crystal and

you can't look at a more of this materials
the analysis area is actually you know.

This is small for.

Most X. ray tools.

But it has to be you know you the area
you can look at is actually going to be

pretty big.

But you can get about one percent
quantitative analysis from

the from the areas of the peaks.

OK.

Another tool we have is.

Time of flight since.

This is an extremely sensitive.

Spectroscopic technique.

I'm going to show you at the end of this.

All the all the techniques
compared to one another but

the way it works is you have a primary eye
on being that comes into your sample and

it bounces around a transfer of energy.

Well.
Well once in a while you'll get an atom

from the surface.

Popping off.

OK just because of all these
interactions eventually there's going

to transfer enough energy to one
of these surface atoms to escape.

OK to overcome its work function and
to escape in a vacuum.

Once it gets in the vacuum.

It goes through a mass spec.

So I'm aspect takes that mass and it has
to be charged in order to accelerate it.

But when it when it does that you
get a mass to charge ratio and

that is very well it's discreet for
a particular type material.

It's very characteristic.

So.

A uses are gone.

Atoms it detects the secondary ions
that are generated from the surface.

You can collect the full
periodic table and

molecular species because anything
that comes off the surface and

can get charged will go through the mass
spec and you will get a mass to charge

ratio as long as it exists in the library
some are out there or in the literature

somewhere out there you will be able
to identify a material on the surface.

So the strings is a highly sensitive.

It's actually parts per million for
most elements.

And that's basically and that's that's
based on the mass spec part of it.

You can get actually sub monolayer
resolution meaning you can

collect one two atoms out of
a model year and get information.

Pretty high resolution high
lateral resolution because you're

taking a you know is amazing
collimate your argon

ions that's going to be
your ultimate resolution.

Chemical imaging insulating in conductive
samples and it's nondestructive

that's kind of not intuitive it's not
Mr nondestructive because you're taking

atoms off the surface but you know
taking so few that it's nondestructive.

The.

I think our tough since can take
eight inch wafers is that right.

Hong you know eight inch.

You need standards to point
to do quantitative analysis.

Sometimes it's too sensitive and trace
contamination can affect your results so

if you're going to do
time of flight sims and

you put your fingerprint on the areas you
want to look at you're probably not going

to get a good you're going
to get good results.

But you get info from
only one to two monitors.

So it's very powerful.

And I guess that we have this
over in lab one sixty one.

It's called the ion tough tough Sims five.

I think and.

Walter's not here but Walker and
Hong both know how to use that tool.

Ok X. ray fluorescence.

This is the final example of.

You know radiating.

And beam and.

And detected beam combination this is
this is hitting something with X. rays.

And detecting the X. rays.

So just like with.

With the electron beam.

We're going to detect the characteristic
X. rays that come off but instead of

using the electron beam to to generate
the X. rays we're going to use X. rays.

So it can do elemental identification
of solids liquids powders and

alloys it's nondestructive you can do for
way for elemental mapping.

Liquid and solid quantitative
analysis is possible as long as

your standards the sampling depth is deep.

However because you're hitting with X.
rays and you're getting backs X. rays X.

rays penetrate you know
materials pretty deeply.

So you're going to get information
from the bulk of your material.

The limitations are the atomic
number greater than aluminum.

Ten parts per million of
detection is pretty good though.

There's.

No imaging involved and no mapping
involved because basically you just

you know irradiating a sample
with a lot of X. rays.

And the lateral resolution is about
one hundred microns that's you know

depends on how well you can
collimate your X. rays.

We have the Kev X. OMAC Ron X R F.

And that's in lab two forty eight.

Raman spectroscopy.

This is not Raman spectroscopy I put
it up there just looks really nice.

It's a nice sunset right.

And it's kind of you know
it's Raleigh scattering So

this is is the is the analogous
example to Rama scattering

rallies scattering is basically elastic
scattering remember when I talk about

elastic an elastic scattering
elastic means there's

you know there's no energy loss it's
just you know changing directions.

So this is basically
what happens a sunset.

Well sometimes you get inelastic
scattering of monochromatic light

with molecular vibrations I really don't
know Raman spectroscopy very well and

also don't ask me a single
question on this.

The So anyway the impinging photonics
excites a molecule from the ground state

to a higher virtual energy state not
to an actual injuries energy state.

If it were to go to an energy state you're
going to get back these characteristic X.

rays upon relaxation.

This goes to this virtual energy state.

And then when it relaxes
it emits a photon and

returns to a different
rotational vibrational state.

So what happens is because it
returns to a different state.

You've got a shift in the in
the in the overall photon energy.

You can get so
it's like this one this one goes.

Comes down to a lower energy so
that's going to shift.

Red.

I think.

And then this will ship blue.

Don't write that down.

So anyway.

So the excitation source you get
visible layer you can have near I R You

can have near U.V. light.

The detected signal is that same light.

After it undergoes the elastic
scattering with the sample.

So it's used to identify the molecular
structure of organic and

inorganic compounds for contamination
Alice's material classification.

You can characterize carbon layers
like you know you can tell they

didn't regret graphic in Diamond carbon.

Non covalent on that information.

So it's nondestructive it's capable of
identifying organic functional groups and

compounds and there is no vacuum required.

So some of the limitations.

You can analyze about
a one micron Square area.

It's not so quantitative you do get
a lot of fluorescence interference.

No very not very surface incident so
it goes pretty deep interest pretty deep.

So this is my last slide in this I want
you guys to know where to get this is that

the Evans and
little group website labs dot com.

An excellent It's also
posted in the S.C.M. room.

But this is a great chart to help you
pick what technique you need to use.

To do your analysis of your samples.

It basically shows the sensitivity here.

Shows the spot size here.

So the ones that we have
we've got we've got.

We have here as the M.E.D.S.
ramón X. P.S. X. ray diffraction X.

very reflective it's an up not actually
reflectors actually fluorescents

we've got time of flight sims and
that's it.

So we cover this area in this area.

We don't have dynamic sands.

We don't have I.C.B.M.'s.

But this is this is what you
what you all have your your.

To you for your research right now.

OK And
the reason I wanted to do this is and

I was hoping that Brett would be here
because we've been talking about.

Offering up some short courses
to our users there not.

Classes but they'd be.

You know one two day afternoons

where we just go into depth
about how the equipment.

Is used most effectively and optimally.

So what I mean like I saw here not many
people took the S.C.M. course it's

an extremely valuable course if you want
to really understand how to use S.C.M. but

it's a graduate level course and
it takes a whole semester right.

So we're talking about trying to offer
up some of these characterisation

courses in the form of.

New kind of extended seminars.

You know word or short courses so.

We haven't done much more than
just talk about it at this point.

But I think that would be
valuable to the users and and

I would I welcome any of your feedback
as to if you would attend it.

So.

Any questions.

Thank you.

It's Evans and a little group.

It's not on here.

Eat A.G. labs.

Dot com.

Yeah.

Not yet
we're filling up some space downstairs and

we'll get a T.M.
as part of a faculty moved.

It's upcoming.

So and it will be accessible to the users
probably going to be a Tech nine I.

Like he's still he's
still looking at the top.

Titan G two maybe but
anyway it's pretty good.

T M.

So

the so there are certain tools
we're going to Death profiling So

what you would do is you
would take a surface scan.

Using something like X P S.

It's very surface sensitive.

Then you sputter it away better
away of the top layer then

you take another scan then you sputter
away another layer and take another scan.

And you can plot.

Your elemental peaks with depth and
so that will tell you.

If you have any transitions
between surface materials down

to underlying fears.

Yeah I would destroy your sample.

Yes destructive.

I don't know how to do analysis

at depth without getting surface
information from the I think

you need to do depth profiling
in this destructive.

Pinholes.

Kind of film.

Usually those show up after you do your
metal ization and you've got a short one.

Yeah.

That's kind of hard.

Does anybody know I mean is there a way to

nondestructively characterize
pinholes in a dielectric.

And I don't know what.

You know what that was about to ask so

what do you think is
the density of these things.

How many of them are there.

Yeah there's a big hole or they're all
over the place where they're going or to.

You know it's just yet.

So what Sarah saying is you
could you could take the S.C.M.

you can image in the S.C.M. and
you can and you can look over samples and

hopefully finally get a job right out.

How big are the holes again.

Yeah but I'm like after death smartass.

Like.

So you can talk to Hong after this.

In the questions.

And I will thank you all for coming.

Appreciate and I hope this was
informative and if you have any.

Any you know questions about
which takes and techniques to

use you can talk to myself in talk to
Hong standing talk to Walter Henderson.

We're all members of the staff here.

Thank you.